diff --git a/toolchain/cc_wrapper.sh.tpl b/toolchain/cc_wrapper.sh.tpl
index e972d57e6..b3cb23386 100644
--- a/toolchain/cc_wrapper.sh.tpl
+++ b/toolchain/cc_wrapper.sh.tpl
@@ -29,6 +29,16 @@
 
 set -euo pipefail
 
+CLEANUP_FILES=()
+
+function cleanup() {
+  if [[ ${#CLEANUP_FILES[@]} -gt 0 ]]; then
+    rm -f "${CLEANUP_FILES[@]}"
+  fi
+}
+
+trap cleanup EXIT
+
 # See note in toolchain/internal/configure.bzl where we define
 # `wrapper_bin_prefix` for why this wrapper is needed.
 
@@ -60,14 +70,18 @@ function sanitize_option() {
 
 cmd=()
 for ((i = 0; i <= $#; i++)); do
-  if [[ ${!i} == @* ]]; then
+  if [[ ${!i} == @* && -r "${i:1}" ]]; then
+    # Create a new, sanitized file.
+    tmpfile=$(mktemp)
+    CLEANUP_FILES+=("${tmpfile}")
     while IFS= read -r opt; do
       opt="$(
         set -e
         sanitize_option "${opt}"
       )"
-      cmd+=("${opt}")
+      echo "${opt}" >>"${tmpfile}"
     done <"${!i:1}"
+    cmd+=("@${tmpfile}")
   else
     opt="$(
       set -e
@@ -78,4 +92,4 @@ for ((i = 0; i <= $#; i++)); do
 done
 
 # Call the C++ compiler.
-exec "${cmd[@]}"
+"${cmd[@]}"
diff --git a/toolchain/osx_cc_wrapper.sh.tpl b/toolchain/osx_cc_wrapper.sh.tpl
index 31122784b..a005caa30 100755
--- a/toolchain/osx_cc_wrapper.sh.tpl
+++ b/toolchain/osx_cc_wrapper.sh.tpl
@@ -35,6 +35,15 @@ LIBS=
 LIB_DIRS=
 RPATHS=
 OUTPUT=
+CLEANUP_FILES=()
+
+function cleanup() {
+  if [[ ${#CLEANUP_FILES[@]} -gt 0 ]]; then
+    rm -f "${CLEANUP_FILES[@]}"
+  fi
+}
+
+trap cleanup EXIT
 
 function parse_option() {
   local -r opt="$1"
@@ -87,17 +96,19 @@ function sanitize_option() {
 cmd=()
 for ((i = 0; i <= $#; i++)); do
   if [[ ${!i} == @* && -r "${i:1}" ]]; then
+    tmpfile=$(mktemp)
+    CLEANUP_FILES+=("${tmpfile}")
     while IFS= read -r opt; do
       if [[ ${opt} == "-fuse-ld=ld64.lld" ]]; then
-        cmd+=("-fuse-ld=lld")
+        echo "-fuse-ld=lld" >>"${tmpfile}"
       fi
       opt="$(
         set -e
         sanitize_option "${opt}"
       )"
-      parse_option "${opt}"
-      cmd+=("${opt}")
+      parse_option "${opt}" >>"${tmpfile}"
     done <"${!i:1}"
+    cmd+=("@${tmpfile}")
   else
     opt="$(
       set -e